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A comprehensive insight in the MOCVD of aluminium through interaction between reactive transport modeling and targeted growth experiments
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T.C. Xenidou, A.G. Boudouvis, N.C. Markatos, N. Prud’homme and C. Vahlas |
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Publication year: |
2009 |
Language: |
English |
Abstract
Growth experiments and reactive transport modeling were combined to formulate a comprehensive predictive model for aluminum growth from dimethylethylamine alane. The growth-rate profile was experimentally investigated as a function of substrate temperature. The reactive transport model, built under the computational fluid dynamics software ... more |
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